Thin-film distributed RC parameter strain gauges

Thin-film cermet resistance strain gauges provide gauge factors of the order of 15, while providing higher stability than achievable with discontinuous thin-film metallic strain gauges. Strain-sensitive cermet resistors can be incorporated advantageously into thin-film distributed parameter notch filters. This results in a highly sensitive strain-sensing device which can be fabricated by a simple process germain to the thin-film microelectronic technology.