Electron sensitive resists derived from vinylether-maleic anhydride copolymers

A series of polymers derived from vinylether-maleic anhydride copolymers were prepared and their electron sensitivities measured. One of the most sensitive polymers prepared was the allyl half-ester of an octadecylvinylether maleic anhydride copolymer (VL-100). This material was stable, formed excellent films, and was insensitive to UV and visible light with λ > 2000 Å. The sensitivity to electron irradiation was found to be 4 × 10^-8C/cm²at 9 keV compared to 5 × 10^-7for KTFR under identical conditions. The evaluation of this material as an electron resist as well as sensitivity data for numerous derivatives is reported.