Athermalizing and Trimming of Slotted Silicon Microring Resonators With UV-Sensitive PMMA Upper-Cladding

Author

Zhou, Linjie ; Okamoto, Katsunari ; Yoo, S.J.B.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of California, Davis, CA, USA

Volume

21

Issue

17

fYear

2009

Firstpage

1175

Lastpage

1177

Abstract

This letter experimentally demonstrates significant reduction in the resonance thermal sensitivity of the slotted silicon microring resonators by exploiting polymethyl methacrylate (PMMA) as upper-cladding. We investigate the resonance temperature dependence on the slot width with and without PMMA upper-cladding. The experimental results show that the temperature dependence is reduced from 91 pm/degC for a regular microring resonator to 27 pm/degC for the PMMA-clad slotted microring resonator. The ultraviolet (UV) sensitive PMMA upper-cladding also allows the resonance wavelengths of slotted microring resonators shift by 0.5 nm under UV light trimming. With the demonstrated schemes, each individual optical component can be athermalized and precisely registered to standard wavelengths for a future multiwavelength optically interconnected computing system-on-a-chip.

Keywords

elemental semiconductors; micro-optomechanical devices; micromechanical resonators; optical resonators; silicon; system-on-chip; thermo-optical effects; ultraviolet spectra; Si; UV light trimming; optical component athermalization; polymethyl methacrylate; resonance thermal sensitivity reduction; slot width; slotted silicon microring resonator; system-on-a-chip; ultraviolet sensitive PMMA upper-cladding; wavelength 0.5 nm; Integrated photonic devices; microring resonators; silicon photonics; slotted waveguides; wavelength-division multiplexing;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2009.2023522

Filename

5061509