• DocumentCode
    1050401
  • Title

    A new heterojunction gate GaAs FET

  • Author

    Umebachi, S. ; Asahi, K. ; Inoue, M. ; Kano, G.

  • Author_Institution
    Matsushita Electronics Corporation, Takatsuki, Osaka, Japan
  • Volume
    22
  • Issue
    8
  • fYear
    1975
  • fDate
    8/1/1975 12:00:00 AM
  • Firstpage
    613
  • Lastpage
    614
  • Abstract
    A new type of GaAs JFET having a heterojunction gate is proposed. The structure involves epitaxially grown layers of n-GaAs for the channel and of p-GaAlAs for the gate which can be easily delineated by the self-alignment technology using an overgrown p-GaAs. The potential advantages of the heterojunction structure for GaAs FET´s over the conventional Schottky barrier are in the fewer masks for fabrication and the short channels expected. Some preliminary experimental results on fabrication technologies and dc characteristics of the new devices are described.
  • Keywords
    Etching; FETs; Fabrication; Gallium arsenide; Heterojunctions; Nonhomogeneous media; Positron emission tomography; Schottky barriers; Substrates; Zinc;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1975.18186
  • Filename
    1478021