DocumentCode :
1050401
Title :
A new heterojunction gate GaAs FET
Author :
Umebachi, S. ; Asahi, K. ; Inoue, M. ; Kano, G.
Author_Institution :
Matsushita Electronics Corporation, Takatsuki, Osaka, Japan
Volume :
22
Issue :
8
fYear :
1975
fDate :
8/1/1975 12:00:00 AM
Firstpage :
613
Lastpage :
614
Abstract :
A new type of GaAs JFET having a heterojunction gate is proposed. The structure involves epitaxially grown layers of n-GaAs for the channel and of p-GaAlAs for the gate which can be easily delineated by the self-alignment technology using an overgrown p-GaAs. The potential advantages of the heterojunction structure for GaAs FET´s over the conventional Schottky barrier are in the fewer masks for fabrication and the short channels expected. Some preliminary experimental results on fabrication technologies and dc characteristics of the new devices are described.
Keywords :
Etching; FETs; Fabrication; Gallium arsenide; Heterojunctions; Nonhomogeneous media; Positron emission tomography; Schottky barriers; Substrates; Zinc;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1975.18186
Filename :
1478021
Link To Document :
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