Title :
Improved triangular voltage sweep (TVS) technique for measurement of ionic charge in MOS structures
Author :
Quick, J. ; Schley, P.
Author_Institution :
Inst. fur Halbleiterphys. Frankfurt GmbH, Germany
Abstract :
The sensitivity and accuracy of the conventional TVS technique is influenced by a capacitive current associated with the MOS capacitor which is superimposed on the ionic current. The authors present a new method and measuring circuit for automatic compensation of the capacitive current at the input of the current measuring instrument.
Keywords :
charge measurement; compensation; metal-insulator-semiconductor devices; metal-insulator-semiconductor structures; MOS capacitor; MOS structures; automatic compensation; capacitive current; ionic charge measurement; ionic current measurement; measuring circuit; triangular voltage sweep;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19930188
