DocumentCode
1052028
Title
A silicon integrated strain-gage transducer with high linearity
Author
Bretschi, J.
Author_Institution
Technik und Biologie der Fraunhofer--Gesellschaft, Karlsruhe, Germany
Volume
23
Issue
1
fYear
1976
fDate
1/1/1976 12:00:00 AM
Firstpage
59
Lastpage
61
Abstract
The disadvantages of semiconductor strain-gage transducers are nonlinearity and temperature sensitivity. Using a monolithic integrated circuit Wheatstone bridge on a silicon cantilever enables linearization by variation of the location or width of the sensing devices. Excellent temperature stability is achieved by the integration itself and an additional external resistor.
Keywords
Bridge circuits; Capacitive sensors; Circuit stability; Conductivity; Linearity; Piezoresistance; Resistors; Silicon; Temperature sensors; Transducers;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1976.18348
Filename
1478362
Link To Document