DocumentCode
1052450
Title
A square-diaphragm piezoresistive pressure sensor with a rectangular central boss for low-pressure ranges
Author
Sandmaier, Hermann ; Kühl, Karl
Author_Institution
Fraunhofer-Inst. fuer Festkorpertechnol., Munich, Germany
Volume
40
Issue
10
fYear
1993
fDate
10/1/1993 12:00:00 AM
Firstpage
1754
Lastpage
1759
Abstract
Describes the theory and experimental data for a piezoresistive low-pressure sensor featuring a variety of advantages. The objective of this development was a sensor with high sensitivity, high overload range, and good linearity. In comparison to familiar sensor types, the sensor developed for the pressure range of 10 kPa exhibits an excellent sensitivity of 35 mV/V FSO (full scale output) and nonlinearity <±0.05%. The sensor´s theoretical performance was confirmed by measurements on manufactured pressure sensors
Keywords
piezoelectric transducers; piezoresistance; pressure sensors; 10 kPa; linearity; low-pressure ranges; nonlinearity; overload range; rectangular central boss; sensitivity; square-diaphragm piezoresistive pressure sensor; Bridge circuits; Linearity; Mechanical sensors; Piezoresistance; Pressure measurement; Resistors; Sensor phenomena and characterization; Silicon; Stress; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.277331
Filename
277331
Link To Document