Title :
A square-diaphragm piezoresistive pressure sensor with a rectangular central boss for low-pressure ranges
Author :
Sandmaier, Hermann ; Kühl, Karl
Author_Institution :
Fraunhofer-Inst. fuer Festkorpertechnol., Munich, Germany
fDate :
10/1/1993 12:00:00 AM
Abstract :
Describes the theory and experimental data for a piezoresistive low-pressure sensor featuring a variety of advantages. The objective of this development was a sensor with high sensitivity, high overload range, and good linearity. In comparison to familiar sensor types, the sensor developed for the pressure range of 10 kPa exhibits an excellent sensitivity of 35 mV/V FSO (full scale output) and nonlinearity <±0.05%. The sensor´s theoretical performance was confirmed by measurements on manufactured pressure sensors
Keywords :
piezoelectric transducers; piezoresistance; pressure sensors; 10 kPa; linearity; low-pressure ranges; nonlinearity; overload range; rectangular central boss; sensitivity; square-diaphragm piezoresistive pressure sensor; Bridge circuits; Linearity; Mechanical sensors; Piezoresistance; Pressure measurement; Resistors; Sensor phenomena and characterization; Silicon; Stress; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
