Design and implementation of MEMS Cockcroft-Walton voltage multiplier

A design modification to the Cockcroft-Walton (CW) voltage multiplier is reported for the purpose of miniaturisation using MEMS. The configuration comprises a cascade of CW voltage-doublers connected through their outputs and supply points (V _dd). Each voltage doubler is a two-stage CW multiplier that consists of four switches and three capacitors. The classical CW voltage multiplier has voltage amplification of N _s, where N _s = 2N _d (N _d is the number of voltage doublers), while the modified design has an amplification of 2N _d. Using this configuration, a novel MEMS voltage doubler has been experimentally realised with micro-relays and capacitors. The MEMS relays and capacitors were fabricated using the MetalMUMPs MEMS process. Measurements on the MEMS voltage doubler have been conducted. A voltage output of 400 V has been demonstrated, and the risetime is measured to be around 260 ms.