Title :
Surface acoustic wave properties of freestanding diamond films
Author :
Flannery, Colm M. ; Whitfield, Michael D. ; Jackman, Richard B
Author_Institution :
Paul-Drude-Inst. fur Festkorperelektronik, Berlin, Germany
fDate :
3/1/2004 12:00:00 AM
Abstract :
"Ideal" diamond has the highest acoustic velocity of any material known, and is of great interest as a substrate material for high frequency surface acoustic wave (SAW) device structures. However, little is known of the acoustic wave propagation properties of polycrystalline diamond grown by chemical vapour deposition (CVD) techniques, the commercially accessible form of this material. We report on propagation of laser-generated SAW on three forms of freestanding CVD diamond samples, "white" polycrystalline, "black" polycrystalline, and "highly oriented" diamond. Despite differing sample nature, SAW waves propagating along the smooth (nucleation) side of the diamond showed similar velocities in the range 10600-11900 ms/sup -1/. These results are discussed in terms of the potential of each form of CVD diamond for SAW device fabrication.
Keywords :
CVD coatings; acoustic wave propagation; acoustic wave velocity; diamond; elemental semiconductors; semiconductor thin films; surface acoustic waves; C; CVD; SAW device fabrication; acoustic velocity; acoustic wave propagation properties; black polycrystalline diamond; chemical vapour deposition; diamond; freestanding diamond films; high frequency surface acoustic wave device structures; highly oriented diamond; laser generated SAW; nucleation; surface acoustic wave properties; white polycrystalline diamond; Acoustic devices; Acoustic materials; Acoustic propagation; Acoustic waves; Chemical vapor deposition; Frequency; Optical materials; Optical propagation; Surface acoustic wave devices; Surface acoustic waves;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2004.1320794
