Author :
Ashley, T. ; Buckle, L. ; Datta, S. ; Emeny, M.T. ; Hayes, D.G. ; Hilton, K.P. ; Jefferies, R. ; Martin, T. ; Phillips, T.J. ; Wallis, D.J. ; Wilding, P.J. ; Chau, R.
Abstract :
The heterogeneous integration of InSb quantum well transistors onto silicon substrates is investigated for the first time. 85 nm gate length FETs with fT = 305 GHz at Vds = 0.5 V and DC performance suitable for digital logic are demonstrated on material with a buffer just 1.8 mum thick. An initial step towards integrating InSb FETs with mainstream Si CMOS for high-speed energy-efficient logic applications has been achieved.