• DocumentCode
    1052886
  • Title

    2-D simulation of interface properties of a polysilicon-contacted BJT: is there a residual potential barrier after the oxide is broken?

  • Author

    Egley, J.L.

  • Author_Institution
    Integrated Technol. Lab., IBM Corp., Rochester, MN, USA
  • Volume
    41
  • Issue
    2
  • fYear
    1994
  • fDate
    2/1/1994 12:00:00 AM
  • Firstpage
    217
  • Lastpage
    220
  • Abstract
    Two dimensional simulations were performed on a poly-contacted bipolar, studying the effects of changing the size of broken sections of the “oxide” on the base current. Previous simulations (Egley et al. 1991) used sections which were ~250 Å in length, while the simulations presented here use ~50 Å sections, closer to what was observed from TEM by Wolstenholme et al. (1987). The smaller gaps provide a substantially more rapid increase in base current with percentage oxide broken than found with the 250 Å sections. This extremely rapid rise in base current with the percentage oxide broken is not observed experimentally. It is proposed that a residual barrier remains after a section of the oxide is removed. This potential energy barrier would arise from the grain boundary itself and from the possible presence of electrically active As there
  • Keywords
    bipolar transistors; elemental semiconductors; grain boundaries; interface electron states; semiconductor device models; silicon; 2-D simulation; 50 A; Si-SiO2; base current; broken sections; electrically active As; grain boundary; interface properties; oxide; poly-contacted bipolar; polysilicon-contacted BJT; potential energy barrier; residual potential barrier; two dimensional simulations; Analytical models; Annealing; Contacts; Distribution functions; Grain boundaries; Helium; Insulation; Potential energy; Silicon; Temperature;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.277376
  • Filename
    277376