A light-transmitting two-dimensional photodetector array using a-Si pin photodiodes and poly-Si TFT´s integrated on a transparent substrate

Author

Okamura, Masamichi ; Kimura, Kazuo ; Shirai, Seiiti ; Yamauchi, Noriyoshi

Author_Institution

NTT Interdisciplinary Res. Labs., Tokyo, Japan

Volume

41

Issue

2

fYear

1994

fDate

2/1/1994 12:00:00 AM

Firstpage

180

Lastpage

185

Abstract

A light-transmitting two-dimensional photodetector array (32×32 cells) using amorphous silicon (a-Si) pin photodiodes and polysilicon (poly-Si) thin film transistors (TFT´s) integrated on a transparent substrate has been developed for use in a free-space optical switching network. The fabrication and the characteristics of the photodetector array are discussed. With driving circuits and sensing amplifiers, this photodetector array shows a minimum detectable power of -25 dBm and an insertion loss of 0.4 dB for an incident optical beam with a diameter of 550 μm. By monitoring the positions and the states of input optical beams, this photodetector array can be used to control the optical paths in photonic switching systems, such as a 1024-input-port optical concentrator

Keywords

amorphous semiconductors; elemental semiconductors; integrated optoelectronics; light transmission; optical fibres; optical switches; p-i-n photodiodes; photodetectors; silicon; switching networks; thin film transistors; 0.4 dB; 1024-input-port optical concentrator; 620 to 690 nm; Si; a-Si pin photodiodes; driving circuits; free-space optical switching network; insertion loss; light-transmitting two-dimensional photodetector; minimum detectable power; photonic switching systems; polysilicon thin film transistors; sensing amplifiers; transparent substrate; Amorphous silicon; Optical arrays; Optical beams; Optical control; Optical films; Optical sensors; PIN photodiodes; Photodetectors; Stimulated emission; Thin film transistors;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.277382

Filename

277382