DocumentCode
1053125
Title
Observation of electromigration at low temperature
Author
Rhoden, William E. ; Banton, David W. ; Kitchen, Donald R. ; Maskowitz, James V.
Author_Institution
Aeronaut. Syst. Div., Wright-Patterson AFB, OH, USA
Volume
40
Issue
5
fYear
1991
fDate
12/1/1991 12:00:00 AM
Firstpage
524
Lastpage
530
Abstract
Electromigration and mean time-to-failure were investigated for unglassed thin Al stripes over the temperature range of 223 K to 347 K. Thermal effects are minimized by sinking heat from the linestrip through the substrate to a miniature cryogenic refrigerator. This test technique allows the investigation of structure and current interactions while suppressing the effects of an added temperature factor. The circuit was stressed by direct current densities greater than 4×106 A/cm2. Electromigration damage was induced in a test stripe at temperatures near 0°C. For the temperature range of 347 K to 267 K, an activation energy of 0.30 eV was calculated, indicating that surface migration is the dominant failure mechanism. For temperatures between 267 K and 223 K, a calculated activation energy of 0.12 eV suggests a different failure mechanism, which was subsequently identified as stripe separation from the substrate
Keywords
aluminium; electromigration; failure analysis; integrated circuit testing; metallisation; 223 to 347 K; Al metallisation; activation energy; direct current densities; electromigration; failure mechanism; low temperature; mean time-to-failure; stripe separation; surface migration; test technique; unglassed thin Al stripes; Aluminum; Current density; Electromigration; Failure analysis; Refrigeration; Reliability engineering; Scanning electron microscopy; Temperature distribution; Testing; Thermal force;
fLanguage
English
Journal_Title
Reliability, IEEE Transactions on
Publisher
ieee
ISSN
0018-9529
Type
jour
DOI
10.1109/24.106767
Filename
106767
Link To Document