• DocumentCode
    1053125
  • Title

    Observation of electromigration at low temperature

  • Author

    Rhoden, William E. ; Banton, David W. ; Kitchen, Donald R. ; Maskowitz, James V.

  • Author_Institution
    Aeronaut. Syst. Div., Wright-Patterson AFB, OH, USA
  • Volume
    40
  • Issue
    5
  • fYear
    1991
  • fDate
    12/1/1991 12:00:00 AM
  • Firstpage
    524
  • Lastpage
    530
  • Abstract
    Electromigration and mean time-to-failure were investigated for unglassed thin Al stripes over the temperature range of 223 K to 347 K. Thermal effects are minimized by sinking heat from the linestrip through the substrate to a miniature cryogenic refrigerator. This test technique allows the investigation of structure and current interactions while suppressing the effects of an added temperature factor. The circuit was stressed by direct current densities greater than 4×106 A/cm2. Electromigration damage was induced in a test stripe at temperatures near 0°C. For the temperature range of 347 K to 267 K, an activation energy of 0.30 eV was calculated, indicating that surface migration is the dominant failure mechanism. For temperatures between 267 K and 223 K, a calculated activation energy of 0.12 eV suggests a different failure mechanism, which was subsequently identified as stripe separation from the substrate
  • Keywords
    aluminium; electromigration; failure analysis; integrated circuit testing; metallisation; 223 to 347 K; Al metallisation; activation energy; direct current densities; electromigration; failure mechanism; low temperature; mean time-to-failure; stripe separation; surface migration; test technique; unglassed thin Al stripes; Aluminum; Current density; Electromigration; Failure analysis; Refrigeration; Reliability engineering; Scanning electron microscopy; Temperature distribution; Testing; Thermal force;
  • fLanguage
    English
  • Journal_Title
    Reliability, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9529
  • Type

    jour

  • DOI
    10.1109/24.106767
  • Filename
    106767