Micromechanical optical switching with voltage control using SOI movable integrated optical waveguides

Author

Eng, Terry T H ; Sin, Stephen Y S ; Kan, Sidney C. ; Wong, George K.L.

Author_Institution

Dept. of Phys., Hong Kong Polytech., Kowloon, Hong Kong

Volume

7

Issue

11

fYear

1995

Firstpage

1297

Lastpage

1299

Abstract

Optical switching is demonstrated using movable integrated optical waveguides fabricated on silicon-on-insulator substrates. The switching effect is produced by the voltage-controlled micromechanical deflection of the movable waveguides. The dynamic response of the deflection is studied. A contrast ratio of 12 dB of switching is obtained using an applied voltage of less than 10 V. At 20 V, the contrast ratio is about 40 dB.<>

Keywords

electro-optical switches; integrated optics; micromechanical devices; optical communication equipment; optical waveguides; silicon-on-insulator; substrates; 10 V; 20 V; SOI movable integrated optical waveguides; applied voltage; contrast ratio; dynamic response; micromechanical optical switching; optical switching; silicon-on-insulator substrates; switching effect; voltage control; voltage-controlled micromechanical deflection; Communication switching; Integrated optics; Micromechanical devices; Optical fibers; Optical films; Optical surface waves; Optical switches; Optical waveguides; Silicon compounds; Voltage control;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.473477

Filename

473477