Title :
Micromechanical optical switching with voltage control using SOI movable integrated optical waveguides
Author :
Eng, Terry T H ; Sin, Stephen Y S ; Kan, Sidney C. ; Wong, George K.L.
Author_Institution :
Dept. of Phys., Hong Kong Polytech., Kowloon, Hong Kong
Abstract :
Optical switching is demonstrated using movable integrated optical waveguides fabricated on silicon-on-insulator substrates. The switching effect is produced by the voltage-controlled micromechanical deflection of the movable waveguides. The dynamic response of the deflection is studied. A contrast ratio of 12 dB of switching is obtained using an applied voltage of less than 10 V. At 20 V, the contrast ratio is about 40 dB.<>
Keywords :
electro-optical switches; integrated optics; micromechanical devices; optical communication equipment; optical waveguides; silicon-on-insulator; substrates; 10 V; 20 V; SOI movable integrated optical waveguides; applied voltage; contrast ratio; dynamic response; micromechanical optical switching; optical switching; silicon-on-insulator substrates; switching effect; voltage control; voltage-controlled micromechanical deflection; Communication switching; Integrated optics; Micromechanical devices; Optical fibers; Optical films; Optical surface waves; Optical switches; Optical waveguides; Silicon compounds; Voltage control;
Journal_Title :
Photonics Technology Letters, IEEE
