A method for precision patterning of silicone elastomer and its applications

Author

Ryu, Kee Suk ; Wang, Xuefeng ; Shaikh, Kashan ; Liu, Chang

Author_Institution

Sensors & Syst. Group, Univ. of Illinois, Urbana, IL, USA

Volume

13

Issue

4

fYear

2004

Firstpage

568

Lastpage

575

Abstract

This paper presents a general microfabrication method for precision patterning of thin-film poly(dimethylsiloxane) (PDMS). The method enables PDMS microstructures with controlled lateral dimensions and thickness on a silicon or glass substrate. Two applications based on this new method are discussed. First, a scanning probe microscopy (SPM) probe with PDMS tip is developed and used for scanning probe contact printing (SPCP). Second, this paper demonstrates surface micromachined membranes with integrated silicone gaskets.

Keywords

elastomers; micromachining; scanning probe microscopy; silicon; substrates; thin films; glass substrate; integrated silicone gaskets; lateral dimensions; microfabrication method; microstructures; precision patterning; scanning probe contact printing; scanning probe microscopy probe; silicon; silicone elastomer; surface micro-machined membranes; thin-film poly(dimethyl-siloxane); Biomembranes; Gaskets; Glass; Microstructure; Printing; Scanning probe microscopy; Silicon; Substrates; Thickness control; Transistors; PDMS; Poly; SPCP; SPM; dimethylsiloxane; probes; scanning probe contact printing; scanning probe microscopy;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2004.832188

Filename

1321093