Title :
Biofilter technology: an innovative and cost-effective system to remove VOC
Author :
Jantschak, Andreas ; Daniels, Marc ; Paschold, Rainer
Author_Institution :
Philips Semicond. GmbH, Hamburg, Germany
Abstract :
Biofilter technology is a cost-effective technique with an excellent efficiency for volatile organic compound (VOC) treatment. It is an attractive alternative to conventional air pollution abatement technologies. In this project, a combination of a Biosrubber and a Biofilter (called Biofilter System) was tested with VOC-laden exhaust air from a semiconductor fab. This Biofilter System meets all requirements of German and European law and protects the environment. The results of this project demonstrate that it is possible to establish this innovative and emerging technology in the semiconductor industry.
Keywords :
air pollution; biological techniques; biosensors; electronics industry; organic compounds; biofilter technology; biosrubber system; conventional air pollution abatement technology; cost-effective system; laden exhaust air; semiconductor fabrication; semiconductor industry; volatile organic compound treatment; Biodegradation; Bioreactors; Carbon dioxide; Electronics industry; Inductors; Law; Legal factors; Microorganisms; Organic compounds; Oxidation; Air pollution; emission; organic compounds; semiconductor electronics industry;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2004.831936
