Title :
High-speed AMHS and its operation method for 300-mm QTAT fab
Author :
Wakabayashi, Takayuki ; Watanabe, Shinichi ; Kobayashi, Yoshiaki ; Okabe, Tsutomu ; Koike, Atsuyoshi
Author_Institution :
Trecenti Technol. Inc., Ibaraki, Japan
Abstract :
By using all-single-wafer processing in the 300-mm quick turn-around time production system, we have shortened cycle time to one-half or less than that of mixed-batch processing. We have also developed a high-speed automated material handling systems (AMHS) for achieving short cycle time. An intrabay rail-guided vehicle developed for the 300-mm fab is a component of this system. This paper describes the new system concepts, including AMHS hardware improvement, operation methods, and technician skill enhancement. We achieved a transfer time of one third or less that of previous fabs.
Keywords :
automatic guided vehicles; batch processing (industrial); batch production systems; materials handling; semiconductor device manufacture; semiconductor technology; 300 nm; cycle time reduction; high speed automated material handling systems; intrabay rail guided vehicle; mixed batch processing; quick turn around time production system; single wafer processing; Acceleration; Automatic control; Control systems; Hardware; Manufacturing automation; Materials handling; Production systems; Rails; Semiconductor device manufacture; Vehicles; Cycle-time reduction; manufacturing automation; materials handling; single-wafer process;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2004.831925
