DocumentCode :
1054988
Title :
Introduction to the Special Issue: High- 
Reliability—Status 2009
Author :
Pantisano, L. ; Lee, Bi-Hui ; Niwa, Masaaki
Volume :
9
Issue :
2
fYear :
2009
fDate :
6/1/2009 12:00:00 AM
Firstpage :
145
Lastpage :
146
Abstract :
The five invited papers in this special issue address important topics surrounding the use and implementation of high-k dielectrics.
Keywords :
Character generation; Helium; High K dielectric materials; High-K gate dielectrics; Logic; Low-frequency noise; Materials reliability; Micromechanical devices; Special issues and sections; Testing;
fLanguage :
English
Journal_Title :
Device and Materials Reliability, IEEE Transactions on
Publisher :
ieee
ISSN :
1530-4388
Type :
jour
DOI :
10.1109/TDMR.2009.2020666
Filename :
5062540
Link To Document :
