• DocumentCode
    1054988
  • Title

    Introduction to the Special Issue: High- k Reliability—Status 2009

  • Author

    Pantisano, L. ; Lee, Bi-Hui ; Niwa, Masaaki

  • Volume
    9
  • Issue
    2
  • fYear
    2009
  • fDate
    6/1/2009 12:00:00 AM
  • Firstpage
    145
  • Lastpage
    146
  • Abstract
    The five invited papers in this special issue address important topics surrounding the use and implementation of high-k dielectrics.
  • Keywords
    Character generation; Helium; High K dielectric materials; High-K gate dielectrics; Logic; Low-frequency noise; Materials reliability; Micromechanical devices; Special issues and sections; Testing;
  • fLanguage
    English
  • Journal_Title
    Device and Materials Reliability, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1530-4388
  • Type

    jour

  • DOI
    10.1109/TDMR.2009.2020666
  • Filename
    5062540
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1054988