A self-consistent particle model for the simulation of RF glow discharges

Author

Trombley, Henry W. ; Terry, Fred L., Jr. ; Elta, Michael E.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

Volume

19

Issue

2

fYear

1991

fDate

4/1/1991 12:00:00 AM

Firstpage

158

Lastpage

162

Abstract

A self-consistent particle model of an argon RF glow discharge has been developed. Electric field and charged-particle density profiles determined from simulations with the RF glow discharge model are consistent with results obtained from continuum models. The average ion energy is found to vary greatly between the bulk of the discharge and sheaths, contrary to the assumption that the ion energy is uniform, as is assumed in some continuum models. The accuracy of the particle cross sections and collision representation used in the model is verified with a simplified DC model which calculates swarm parameters. Electron swarm parameters determined with this model are in excellent agreement with experimental data taken from the literature

Keywords

argon; glow discharges; high-frequency discharges; plasma density; plasma simulation; Ar; RF glow discharges; average ion energy; charged-particle density profiles; collision representation; electric field profiles; particle cross sections; self-consistent particle model; simplified DC model; simulation; swarm parameters; Argon; Circuit simulation; Computational modeling; Electrons; Etching; Glow discharges; Integrated circuit manufacture; Plasma applications; Plasma simulation; Radio frequency;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.106809

Filename

106809