• DocumentCode
    1055434
  • Title

    Reliability of metal interconnect after a high-current pulse

  • Author

    Scarpulla, John ; Eng, David C. ; Brown, Stephanie ; MacWilliams, Kenneth P.

  • Author_Institution
    Aerosp. Corp., Los Angeles, CA, USA
  • Volume
    17
  • Issue
    7
  • fYear
    1996
  • fDate
    7/1/1996 12:00:00 AM
  • Firstpage
    322
  • Lastpage
    324
  • Abstract
    In certain situations, very large scale integration (VLSI) metal interconnects are subjected to short duration high current pulses. This occurs in FPGA programming, and in radiation testing for latchup. The authors have determined the effects of such pulsing on the long term reliability of Al (1% Cu) metallization with W cladding on top and bottom. The reliabilities of pulsed and unpulsed lines were established using accelerated electromigration testing. Lines pulsed below the immediate catastrophic threshold were seen to have slightly improved electromigration lifetimes, but as the failure threshold is approached, electromigration lifetime decreases abruptly. Therefore, high current pulsing provides no reliability hazard in this metallization system below catastrophic threshold.
  • Keywords
    VLSI; aluminium alloys; copper alloys; electromigration; failure analysis; impulse testing; integrated circuit interconnections; integrated circuit metallisation; integrated circuit reliability; integrated circuit testing; life testing; FPGA programming; W-AlCu-W; accelerated electromigration testing; catastrophic threshold; failure threshold; high current pulsing; high-current pulse; metal interconnect; pulsed lines; radiation testing; reliability; unpulsed lines; very large scale integration; Artificial intelligence; Conductors; Current density; DNA; Electromigration; Integrated circuit interconnections; Large-scale systems; Metallization; Testing; Very large scale integration;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/55.506355
  • Filename
    506355