Title :
Remarks on transmission characteristics of positive photoresists
Author_Institution :
The Research Institute for Technical Physics of the Hungarian Academy of Scinces, Budapest, Hungary
fDate :
2/1/1977 12:00:00 AM
Abstract :
The transmission characteristics of positive photoresists in connection with contact photoresist procedure are considered. The use of monochromatic illumination with wavelengths over 400 nm is suggested.
Keywords :
Bleaching; Glass; Holography; Lighting; Microelectronics; Optical materials; Physics; Resists; Temperature; Wavelength measurement;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1977.18703
