• DocumentCode
    1055820
  • Title

    RF discharge in the transverse magnetic field numerical model

  • Author

    Lukyanova, A.V. ; Rakhimov, A.T. ; Suetin, N.V.

  • Author_Institution
    Res. Inst. of Nucl. Phys., Moscow State Univ., USSR
  • Volume
    19
  • Issue
    2
  • fYear
    1991
  • fDate
    4/1/1991 12:00:00 AM
  • Firstpage
    197
  • Lastpage
    203
  • Abstract
    A numerical model of RF discharges in a steady transverse magnetic field is developed. This model is valid in a range of parameters (gas pressure, magnetic field, RF voltage) used in a number of experimental and technical installations. The comparison between numerical calculations and some experimental results is presented
  • Keywords
    high-frequency discharges; plasma simulation; RF discharges; transverse magnetic field numerical model; Anisotropic magnetoresistance; Electrodes; Electrons; Magnetic fields; Magnetic materials; Numerical models; Radio frequency; Sputtering; Surface treatment; Voltage;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.106814
  • Filename
    106814
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1055820