Reflection and scattering by a single groove in integrated optics

The reflection and scattering properties of guided optical waves at a single groove discontinuity are studied in this paper. The groove is on the surface of an optical thin-film waveguide commonly used in integrated optics. Both the fundamental TE0and TM0modes are considered. The problem is treated by a boundary perturbation technique. The power reflection coefficient, the radiation patterns, and the power of waves scattered into the free space and the substrate are found. Numerical results from an example are given to illustrate the effect of the geometric shape of the groove.