DocumentCode :
1056627
Title :
Vertical current components in integrated injection logic
Author :
Elsaid, Mohamed H. ; Roulston, D.J. ; Watt, Lynn A K
Author_Institution :
University of Waterloo, Ont., Canada
Volume :
24
Issue :
6
fYear :
1977
fDate :
6/1/1977 12:00:00 AM
Firstpage :
643
Lastpage :
647
Abstract :
Analytic expressions representing a double diffused transistor impurity profile are used to calculate the current components in IIL structures. The expression for the hole current is given for IIL structures with the epitaxial layer grown on a wide n+substrate and for buried layer structures. It was found that an equivalent recombination velocity at the n-n+interface, S_{nn+} , is of order 102higher in buried layer structures than in structures with the epitaxial layer grown on a wide n+substrate for comparable doping levels. Results obtained using the analytic expressions are compared with those obtained using a computer program which includes heavy doping effects and doping level mobility dependence. Both calculated and computed results are also compared with measured currents for a given IIL structure with the epitaxial layer grown on a wide n+substrate. The calculated and the computed results are in good agreement with the experimental results.
Keywords :
Charge carrier processes; Doping; Electrons; Epitaxial layers; Exponential distribution; Impurities; Logic; Photonic band gap; Semiconductor process modeling; Substrates;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1977.18796
Filename :
1478988
Link To Document :
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