Title :
High-speed UV micro-machining of polymers with frequency-doubled copper vapor lasers
Author :
Glover, Alison C J ; Illy, Elizabeth K. ; Piper, James A.
Author_Institution :
Centre for Lasers & Applications, Macquarie Univ., North Ryde, NSW, Australia
fDate :
9/1/1995 12:00:00 AM
Abstract :
We report high-speed ultra-violet (UV) micro machining of polymers using a high beam quality frequency-doubled copper vapor laser (CTL). The characteristics of the UV laser source and beam delivery optics are described, Measurements of material removal rates have been made for a number of polymers. Results for UV-CVL micro-drilling of PETG and polyimide (kapton) show removal rates per pulse similar to other UV sources, but the high pulse repetition frequency of the UV-CVL results in much enhanced temporal material removal rates
Keywords :
copper; gas lasers; high-speed optical techniques; laser beam applications; laser beam machining; micromachining; optical harmonic generation; polymers; Cu; PETG; UV laser source; UV sources; beam delivery optics; enhanced temporal material removal rates; frequency-doubled Cu vapor lasers; high pulse repetition frequency; high-speed UV micro-machining; kapton; material removal rates; micro-drilling; polyimide; polymers; removal rates; Copper; Frequency; High speed optical techniques; Laser beams; Machining; Optical beams; Optical materials; Optical polymers; Optical pulses; Polyimides;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/2944.473666
