• DocumentCode
    1057293
  • Title

    Numerical calculations for the electron energy distribution in a helium, hollow-cathode glow discharge

  • Author

    Hashiguchi, Seishiro

  • Author_Institution
    Dept. of Electron. & Inf. Sci., Kyoto Inst. of Technol., Japan
  • Volume
    19
  • Issue
    2
  • fYear
    1991
  • fDate
    4/1/1991 12:00:00 AM
  • Firstpage
    297
  • Lastpage
    300
  • Abstract
    An electron energy distribution is determined with the Monte Carlo method in a helium, hollow-cathode glow discharge. Electron-electron collisions are taken into account, as well as electron collisions with atoms. In the negative glow, a plateau-like profile is obtained in the low-energy region; the profile approximates a Maxwellian distribution in this energy range. The energy distribution decreases rapidly at about the minimum excitation energy of the atom. In the center of the negative glow, the low-energy electrons are five orders of magnitude as many as the high-energy electrons, which have enough energy to excite or ionize atoms
  • Keywords
    Monte Carlo methods; glow discharges; helium; He discharge; Maxwellian distribution; Monte Carlo method; electron energy distribution; electron-atom collisions; electron-electron collisions; hollow-cathode glow discharge; low-energy region; negative glow; plateau-like profile; Cathodes; Distribution functions; Electrons; Glow discharges; Helium; Ionization; Land surface temperature; Nonuniform electric fields; Stationary state; Voltage;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.106827
  • Filename
    106827