Compact Microracetrack Resonator Devices Based on Small SU-8 Polymer Strip Waveguides

Author

Dai, Daoxin ; Yang, Bo ; Yang, Liu ; Sheng, Zhen ; He, Sailing

Author_Institution

Centre for Opt. & Electromagn. Res., Zhejiang Univ., Hangzhou

Volume

21

Issue

4

fYear

2009

Firstpage

254

Lastpage

256

Abstract

Compact microracetrack resonator (MRR) devices are presented with small SU-8 polymer strip waveguides. The SU-8 strip waveguide has an SU-8 polymer core (n~1.573) , a SiO₂ buffer (n~1.445), and an air cladding. The fabricated straight waveguide has a low propagation loss of about 0.1 dB/mm. With such a high index-contrast optical waveguide, a compact MRR with a small bending radius (~150 mum) are designed and fabricated. The measured spectral responses of the through/drop ports show a Q-factor of 8000.

Keywords

Q-factor; elemental semiconductors; integrated optics; micro-optomechanical devices; micromechanical resonators; optical design techniques; optical fabrication; optical losses; optical polymers; optical resonators; optical waveguides; silicon; MRR device; Q-factor; Si; air cladding; compact microracetrack resonator; high-index-contrast straight optical waveguide fabrication; high-index-contrast straight optical waveguide fabricationpropagation loss; photonic integrated circuits; silica buffer; small-SU-8 polymer strip waveguide design; small-bending radius; spectral response measurement; Bending; SU-8; resonator; strip; waveguide;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2008.2010555

Filename

4738361