Title :
IIb-8 micromechanical light modulator array fabricated on silicon
fDate :
9/1/1977 12:00:00 AM
Keywords :
Anisotropic magnetoresistance; Biomembranes; Circuits; Electrostatics; Etching; Fabrication; Micromechanical devices; Optical arrays; Optical modulation; Silicon;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1977.18931
