Title :
VI-7 ESR signatures of defects near the Si/SiO2interface
Author :
Poindexter, E.H. ; Caplan, P.J.
fDate :
9/1/1977 12:00:00 AM
Keywords :
Annealing; Conductivity; Etching; Iron; Mouth; Paramagnetic resonance; Signal processing; Silicon; Surface cracks; Surface topography;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1977.18979
