Title :
Scattering loss reduction in polymer waveguides by reflowing
Author :
Leinse, A. ; Diemeer, M.B.J. ; Driessen, A.
Author_Institution :
Integrated Opt. MicroSyst. Group, Univ. of Twente, Enschede, Netherlands
Abstract :
A polymer channel waveguide was fabricated by reactive ion etching. Loss measurements were performed on this waveguide before and after reflowing. The waveguide loss decreases from 3 to 1 dB/cm by heating the sample slightly above the glass transition temperature of the core material. This result in channel loss is very close to the measured film losses of 0.8 dB/cm.
Keywords :
glass transition; integrated optics; optical fabrication; optical losses; optical polymers; optical waveguides; polymer films; sputter etching; channel loss; film losses; glass transition temperature; heating; integrated optics; polymer channel waveguides; reactive ion etching; reflowing; scattering loss reduction; waveguide loss;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20045654
