DocumentCode :
1059229
Title :
Two-dimensional profile of emissive species in a magnetized SiH4/Ar glow discharge for the scanning-plasma CVD method
Author :
Kawasaki, Hiroharu ; Matsuda, Yoshinobu ; Fujiyama, Hiroshi
Author_Institution :
Nagasaki Univ., Japan
Volume :
19
Issue :
2
fYear :
1991
fDate :
4/1/1991 12:00:00 AM
Firstpage :
445
Lastpage :
451
Abstract :
In order to control reactive glow discharge plasmas, the authors have investigated a crossed magnetic field B perpendicular to the discharge electric field E. It was found that profiles of SiH* emission, had two peaks in both the negative glow region and the cathode sheath region. As a result of the modification of the plasma structure by the crossed magnetic field, subsequent modification of spatial profiles of optical emission from SiH and Ar were observed. The Hα emission in the cathode sheath region, were not much influenced by the crossed magnetic field. By applying a modulated magnetic field in AC discharge plasmas (scanning plasma method), time-averaged uniform profiles of both plasmas and SiH radicals could be realized near the substrate sustained outside the discharge region. The minimum inhomogeneities of both profiles were less than 2.5% for the magnetic flux density of several tenths of a gauss, in contrast with 15% for the condition of no magnetic field
Keywords :
argon; glow discharges; plasma CVD; plasma diagnostics; silicon compounds; AC discharge; cathode sheath region; chemical vapour deposition; crossed magnetic field; discharge electric field; magnetised SiH4-Ar glow discharge; reactive glow discharge plasmas; scanning plasma method; scanning-plasma CVD method; spatial profiles; time-averaged uniform profiles; two-dimensional emission profiles; Argon; Cathodes; Glow discharges; Magnetic fields; Magnetic flux; Magnetic modulators; Optical modulation; Plasma density; Plasma sheaths; Stimulated emission;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/27.106844
Filename :
106844
Link To Document :
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