DocumentCode
1059591
Title
Improved enhancement/depletion GaAs MOSFET using anodic oxide as the gate insulator
Author
Colquhoun, Alexander ; Kohn, Erhard ; Hartnagel, Hans L.
Author_Institution
University of Newcastle upon Tyne, Newcastle upon Tyne, England
Volume
25
Issue
3
fYear
1978
fDate
3/1/1978 12:00:00 AM
Firstpage
375
Lastpage
376
Abstract
A GaAs MOSFET with a semi-insulating substrate is described, operating in either the enhancement or the deed depletion modes and showing the highest transconductance reported so far, and a rise time better than 1 ns. The behavior is fully explained by the
characteristics of equivalent MOS capacitors.
characteristics of equivalent MOS capacitors.Keywords
Annealing; Etching; Gallium arsenide; Insulation; MOSFET circuits; Metallization; Ohmic contacts; Resists; Substrates; Transconductance;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1978.19084
Filename
1479478
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