DocumentCode
1059633
Title
High-frequency performance of power VFET
Author
Mok, T.D. ; Salama, C.A.T. ; Salama, C.A.T.
Author_Institution
University of Toronto, Toronto, ON, Canada
Volume
25
Issue
3
fYear
1978
fDate
3/1/1978 12:00:00 AM
Firstpage
384
Lastpage
386
Abstract
The VHF performance of a power junction field-effect transistor with a nonplanar V-shaped channel fabricated by preferrential etching of
Keywords
Capacitance; Dielectric substrates; Epitaxial layers; Etching; Intrusion detection; Ohmic contacts; Power amplifiers; Silicon; Solid state circuits; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1978.19088
Filename
1479482
Link To Document