DocumentCode
1060029
Title
Improved design of hall plates for integrated circuits
Author
Björklund, Gunnar
Author_Institution
RIFA AB, Fack, Spånga, Sweden
Volume
25
Issue
5
fYear
1978
fDate
5/1/1978 12:00:00 AM
Firstpage
541
Lastpage
544
Abstract
Integrated Hall-effect circuits are critically depending on a carefully optimized Hall plate for proper functioning. Using theoretical calculations it is shown how to minimize yield losses due to errors in mask alignement and etching. Experimental results confirm the validity of the theoretical predictions.
Keywords
Electron mobility; Etching; Geometry; Integrated circuit yield; Magnetic fields; Magnetic switching; Production; Silicon; Switches; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1978.19125
Filename
1479519
Link To Document