Monolithically cascaded micromirror pair driven by angular vertical combs for two-axis scanning

Author

Fujino, Makoto ; Patterson, Pamela R. ; Nguyen, Hung ; Piyawattanametha, Wibool ; Wu, Ming C.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

Volume

10

Issue

3

fYear

2004

Firstpage

492

Lastpage

497

Abstract

In this work, monolithically cascaded one-axis micromirrors driven by angular vertical comb drives are designed and fabricated. Using W-shaped folded-beam optics, we demonstrate two-axis scanning covering ±6.0° two-dimensional area at resonant modes of 7.5 kHz, ±17 V for a fast-scanning mirror and 1.2 kHz, ±7 V for a slow-scanning mirror. The experimental results satisfy the requirements for a surveying instrument.

Keywords

micromechanical devices; micromirrors; optical design techniques; optical fabrication; optical scanners; silicon-on-insulator; MEMS; W-shaped folded-beam optics; angular vertical combs; fast-scanning mirror; monolithically cascaded micromirror pair; optical design; optical fabrication; optical scanner; resonant modes; silicon-on-insulator wafer; slow-scanning mirror; surveying instrument; two-axis scanning; Biomedical optical imaging; Instruments; Laser beams; Micromechanical devices; Micromirrors; Mirrors; Optical sensors; Quantum cascade lasers; Resonance; Silicon on insulator technology; Angular vertical comb drive; SOI; micromirror; optical scanner; silicon-on-insulator; wafer;

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/JSTQE.2004.829203

Filename

1323053