A silicon power transistor for use at

-band has been developed utilizing e-beam lithography and ion implantation. The transistor has a bar size of 0.5 × 1 mm
2and consists of four 27.5 × 75-µm
2active cells. With a specially designed package, the combined output power of four cells operating at common base Class

mode is nearly 2 W CW at 8 GHz and almost 1.5 W CW at 10 GHz.