Title :
3-D MOEMS mirror for laser beam pointing and focus control
Author :
Shao, Yuhe ; Dickensheets, David L. ; Himmer, Phillip
Author_Institution :
Electr. & Comput. Eng. Dept., Montana State Univ.-Bozeman, Bozeman, MT, USA
Abstract :
A biaxial torsion scan mirror with a deformable membrane surface is described. The 700-mm-diameter optical surface can be tilted ±4° about two orthogonal axes and can be deformed to a parabola with greater than 3-mm sag at the membrane center. The surface, therefore, acts as a lens with variable focal length ranging from ∞ to 10 mm. Mirror architecture and applications in three-dimensional beam pointing and scanning are discussed.
Keywords :
lenses; micromechanical devices; micromirrors; optical fabrication; optical focusing; 10 mm; 3-μm sag; 3D MOEMS mirror; 700 mum; 700-μm-diameter optical surface; biaxial torsion scan mirror; deformable membrane surface; deformable silicon nitride membrane; focus control; laser beam pointing; lens; single-crystal silicon gimbal; three-dimensional beam pointing; three-dimensional beam scanning; tip-tilt mirrors; variable focal length; Adaptive optics; Biomembranes; Fiber lasers; Focusing; Laser beams; Mirrors; Optical attenuators; Optical control; Optical switches; Silicon; -D; MEMS; MOEMS; Microelectromechanical systems; microoptoelectromechanical systems; mirror; scan mirror; scanner; three-dimensional; tip-tilt mirror; torsion mirror; variable focus lens;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2004.828484
