A two-axis electrothermal micromirror for endoscopic optical coherence tomography

Author

Jain, Ankur ; Kopa, Anthony ; Pan, Yingtian ; Fedder, Gary K. ; Xie, Huikai

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA

Volume

10

Issue

3

fYear

2004

Firstpage

636

Lastpage

642

Abstract

This paper reports a 1-mm², two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40°), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4×4 pixel display using this two-dimensional micromirror device has been demonstrated.

Keywords

aluminium; coatings; elemental semiconductors; endoscopes; infrared imaging; micromachining; micromirrors; optical fabrication; optical scanners; optical tomography; silicon; sputter etching; aluminum coating; deep reactive ion etch post-CMOS micromachining; endoscopic optical coherence tomography; frequency response; resonance frequency shift; scanning micromirror; single crystalline silicon; static response; thermal imaging; two-axis electrothermal micromirror; Electrothermal effects; Etching; Frequency response; Micromachining; Micromirrors; Optical imaging; Particle beam optics; Resonance; Resonant frequency; Tomography; 2-D; Electrothermal actuation; microactuators; mirrors; optical coherence tomography; optical scanners; two-dimensional;

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/JSTQE.2004.829194

Filename

1323071