A Novel Coilless Scanning Mirror Using Eddy Current Lorentz Force and Magnetostatic Force

Author

Yang, Hsueh-An ; Tang, Tsung-Lin ; Lee, Sheng Ta ; Fang, Weileun

Author_Institution

Nat. Tsing Hua Univ., Hsinchu

Volume

16

Issue

3

fYear

2007

fDate

6/1/2007 12:00:00 AM

Firstpage

511

Lastpage

520

Abstract

This paper reports on novel coilless microscanning mirrors driven by the magnetostatic force that resulted from a magnetic interaction as well as the Lorentz force that is induced by an eddy current. This eliminates complicated coil routing and insulation layer deposition and simplifies fabrication allowing easy integration with micromachining and complementary metal-oxide-semiconductor processes. Bulk micromachined one-axis and two-axis scanning mirrors are demonstrated, displaying 1-D and 2-D scanning patterns. Two-dimensional scanning patterns are easily tuned by varying the combination of driving frequencies. The results show that the diamagnetic (Cu) mirror is mainly driven by the eddy-current-induced Lorentz force, whereas the ferromagnetic (Ni) mirror is mainly driven by the magnetostatic force.

Keywords

copper; diamagnetic materials; eddy currents; electromagnetic actuators; ferromagnetic materials; magnetostatics; micro-optomechanical devices; microactuators; micromachining; micromirrors; nickel; optical scanners; 1-D scanning patterns; 2-D scanning patterns; Cu - Element; Ni - Element; coil routing; coilless microscanning mirror; complementary metal-oxide-semiconductor processes; diamagnetic mirror; eddy current Lorentz force; electromagnetic actuation; ferromagnetic mirror; insulation layer deposition; magnetic interaction; magnetostatic force; micromachining; one-axis scanning mirrors; two-axis scanning mirrors; Coils; Eddy currents; Fabrication; Frequency; Insulation; Lorentz covariance; Magnetostatics; Micromachining; Mirrors; Routing; Eddy current; Lorentz force; magnetostatic force; scanning mirror;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2007.896708

Filename

4276808