DocumentCode
1061240
Title
Rapid interpretation of the MOS-C C-t transient
Author
Pierret, Robert F.
Author_Institution
Purdue University, West Lafayette, IN
Volume
25
Issue
9
fYear
1978
fDate
9/1/1978 12:00:00 AM
Firstpage
1157
Lastpage
1159
Abstract
A procedure for rapidly and accurately deducing the generation lifetime from metal-oxide-semiconductor capacitor
transient data is presented, explained, and illustrated.
transient data is presented, explained, and illustrated.Keywords
Capacitance measurement; Capacitors; Conductors; Data analysis; Helium; Monitoring; Niobium; Semiconductor process modeling; Temperature; Transient analysis;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1978.19241
Filename
1479635
Link To Document