Title :
Holographic interference lithography for integrated optics
Author :
Ng, Willie W. ; Hong, Chi-shain ; Yariv, Amnon
Author_Institution :
California Institute of Technology, Pasadena, CA
fDate :
10/1/1978 12:00:00 AM
Abstract :
In this paper, some of our recent work in the use of holographic interference lithography and various material removal techniques to corrugate thin-film optical waveguides are reviewed. The specific applications of these periodic thin-film devices in the distributed feedback and distributed Bragg reflector semiconductor laser, and as output grating couplers, are described. Recent results in the use and fabrication of chirped and curved-line gratings are also summarized.
Keywords :
Distributed feedback devices; Holographic optical components; Holography; Integrated optics; Interference; Lithography; Optical materials; Optical waveguides; Semiconductor materials; Semiconductor thin films;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1978.19251
