DocumentCode
1061606
Title
Influence of surface states on the measurement of field-effect mobility
Author
Hsu, S.T.
Author_Institution
RCA Corporation, Princeton, NJ
Volume
25
Issue
11
fYear
1978
fDate
11/1/1978 12:00:00 AM
Firstpage
1331
Lastpage
1332
Abstract
The effect of surface states on the measurement of field mobility has been analyzed. The result shows that this effect is important when the rate of change of the surface charge density with respect to the surface potential is larger than the mobile charge density at the conductive channel of the MOSFET.
Keywords
Charge carrier processes; Current measurement; Current-voltage characteristics; Fabrication; Impurities; MOSFET circuits; Scattering; Stress; Temperature; Threshold voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1978.19276
Filename
1479670
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