First Internal Spacers\´ Introduction in Record High $I_{\rm ON}/I_{\rm OFF} \hbox {TiN/HfO}_{2}$ Gate Multichannel MOSFET Satisfying Both High-Performance and Low Standby

For the first time, internal spacers have been introduced in multichannel CMOSFET (MCFET) structures, featuring a decrease of the intrinsic CV/I delay by 39%. The process steps introduced for this new MCFET technological option are studied and optimized in order to achieve excellent I_ON/I_OFF characteristics (NMOS: 2.33 mA/mum at 27 pA/mum and PMOS: 1.52 mA/mum at 38 pA/mum). A gate capacitance C _gg reduction of 32% is measured, thanks to S-parameter extraction. Moreover, a significant improvement of the analogical figure of merit is measured compared with optimized fully depleted silicon-on-insulator planar reference; the voltage gain A _VI( = gm/g _ds) is improved by 92%.