Title :
TA-A5 CMOS/SOS transistors with submicrometer gate lengths
Author :
Mayer, D.C. ; Yuan, J.H.
fDate :
11/1/1978 12:00:00 AM
Keywords :
Aluminum; Capacitance measurement; Circuits; Inverters; Laboratories; Lifting equipment; Monitoring; Oxidation; Propagation delay; Resists;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1978.19302
