DocumentCode
1061894
Title
Analysis of the inductance and the stray capacitance of the dry-etched micro inductors
Author
Yamaguchi, M. ; Matsumoto, M. ; Ohzeki, H. ; Arai, K.I.
Author_Institution
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Volume
27
Issue
6
fYear
1991
fDate
11/1/1991 12:00:00 AM
Firstpage
5274
Lastpage
5276
Abstract
Thin film inductors with meander coils or spiral coils were examined systematically. The minimum line spacing of the inductors was 1.5 μm. In case of air core inductors, both inductance and stray capacitance were calculated from the dimension of the inductors, and they agreed well with measured values. With the application of a magnetic thin film, the inductance is increased and the degree of increase was proportional to the length of the coil. It is found that the capacitance between conductor and magnetic film is very significant and needs special consideration
Keywords
capacitance; inductance; inductors; magnetic thin film devices; air core inductors; dry-etched micro inductors; inductance; magnetic thin film; meander coils; spiral coils; stray capacitance; thin film inductors; Capacitance; Coils; Conductors; Impedance; Inductance; Magnetic analysis; Magnetic cores; Magnetic films; Spirals; Thin film inductors;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.278811
Filename
278811
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