Analysis of the inductance and the stray capacitance of the dry-etched micro inductors

Thin film inductors with meander coils or spiral coils were examined systematically. The minimum line spacing of the inductors was 1.5 μm. In case of air core inductors, both inductance and stray capacitance were calculated from the dimension of the inductors, and they agreed well with measured values. With the application of a magnetic thin film, the inductance is increased and the degree of increase was proportional to the length of the coil. It is found that the capacitance between conductor and magnetic film is very significant and needs special consideration