TP-B1 fabrication and design of low-noise InSb thin-film Hall elements for Hall effect magnetic heads
Author :
Kotera, N. ; Oi, Takeshi ; Narita, Kazuyo ; Shigeta, J. ; Sato, Kiminori
Volume :
25
Issue :
11
fYear :
1978
fDate :
11/1/1978 12:00:00 AM
Firstpage :
1350
Lastpage :
1351
Keywords :
Capacitive sensors; Fabrication; Hall effect; Laboratories; Magnetic films; Magnetic heads; Semiconductor device noise; Semiconductor films; Thin film transistors; Zinc oxide;