Title :
TP-B3 an integrated humidity sensor based on the charge-flow transistor
Author :
Senturia, S.D. ; Huberman, M.
fDate :
11/1/1978 12:00:00 AM
Keywords :
Contracts; Crystals; Electrodes; Ferroelectric materials; Humidity; Metallization; NASA; Polarization; Read only memory; Voltage control;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1978.19323
