DocumentCode
1062334
Title
WP-A7 some physical properties of dry high-pressure oxide films on silicon
Author
Irene, E.A. ; Dong, D.W.
Volume
25
Issue
11
fYear
1978
fDate
11/1/1978 12:00:00 AM
Firstpage
1359
Lastpage
1359
Keywords
Absorption; Density measurement; Optical films; Optical refraction; Optical saturation; Refractive index; Residual stresses; Semiconductor films; Silicon; Temperature;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1978.19348
Filename
1479742
Link To Document