DocumentCode :
1062452
Title :
Increase of gate capacitance in DMOST
Author :
Stikvoort, Eduard F.
Author_Institution :
Philips Research Laboratories, Eindhoven, Netherlands
Volume :
25
Issue :
12
fYear :
1978
fDate :
12/1/1978 12:00:00 AM
Firstpage :
1388
Lastpage :
1394
Abstract :
The gate capacitance of an n-channel DMOST at nonzero drain current biasing exceeds that of a similar conventional MOST and may even exceed the gate oxide capacitance. This effect is due to the behavior of mobile electrons in the device. The fundamental operation of the DMOST is understood through the use of a two-dimensional computer analysis. Based on this insight, the increase of the gate capacitance is clarified in terms of the electron velocity between the source and the drain. Gate capacitance measurements are carried out on experimental DMOST\´s, which are made on a p-background as well as on an n-epitaxial layer. The measured C-V curves qualitatively confirm the theory on the increase of the gate capacitance in its dependence on the background of the DMOST and the applied dc voltages.
Keywords :
Area measurement; Capacitance measurement; Capacitance-voltage characteristics; Electron mobility; Epitaxial layers; Semiconductor process modeling; Shape measurement; Substrates; Threshold voltage; Transconductance;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1978.19360
Filename :
1479754
Link To Document :
بازگشت