Title :
GHz bandstop microstrip filter using patterned Ni/sub 78/Fe/sub 22/ ferromagnetic film
Author :
Zhuang, Y. ; Rejaei, B. ; Boellaard, E. ; Vroubel, M. ; Burghartz, J.N.
Author_Institution :
Lab. of Electron. Components, Technol., & Mater., Delft Univ. of Technol., Netherlands
Abstract :
A series of microstrips with patterned Ni/sub 78/Fe/sub 22/ ferromagnetic cores have been investigated for RF applications. The devices have been integrated onto a silicon substrate by using a fully IC-compatible process. The Ni/sub 78/Fe/sub 22/ films were deposited by electroplating onto Si at room temperature and were structured into rectangular prisms with large aspect ratios, i.e., 10:1 and 40:1. Measurements have been performed using a network analyzer. Voltage attenuation of 19 dB/cm has been obtained at 3.9 GHz on a 2-mm-long strip line. The propagating wavelength is reduced by 60% compared to a control device without ferromagnetic core.
Keywords :
Permalloy; band-stop filters; ferromagnetic materials; magnetic cores; magnetic microwave devices; microstrip filters; network analysers; 2 mm; 3.9 GHz; Ni/sub 78/Fe/sub 22/; aspect ratios; bandstop microstrip filter; electroplating; ferromagnetic cores; fully IC-compatible process; network analyzer; patterned ferromagnetic film; propagating wavelength; rectangular prisms; voltage attenuation; Iron; Microstrip filters; Performance analysis; Performance evaluation; Radio frequency; Semiconductor films; Silicon; Temperature; Voltage; Wavelength measurement;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2002.805934
